Abstract

Errors resulting from magnification variations of optical system are largely generated in three-dimensional shape measurements. In the case of measuring the surface morphology of tiny objects based on DFF, images are acquired with a very small interval and then magnification changes are minimized. However, the magnification variations are actually existed in optical system and so focus measures in DFF are wrongly or ambiguously extracted. in this paper, a methodology based on DFF with the magnification changes is proposed to make more accurate measurement in surface morphology with high depth discontinuity, compared with previous ones. Several experiments show that the proposed method outperforms existing ones without magnification changes.

Keywords

• DFF(depth from focus);
• Magnification variation;
• Center move;
• Focus measure

• 배율변화;
• 중심이동;
• 초점척도;