Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Effects of Crystallite Size on Gas Sensitivity and Surface Property of Oxide Semiconductor

산화물 반도체의 결정입도가 가스감도와 표면특성에 미치는 영향

  • Song, Guk-Hyeon (Dept.of Inorganic Materials Engineering,Seoul National University) ;
  • Park, Sun-Ja (Dept.of Inorganic Materials Engineering,Seoul National University)
  • 송국현 (서울대학교 무기재료공학과) ;
  • 박순자 (서울대학교 무기재료공학과)
  • Published : 1993.08.01
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Abstract

The effects of $SnO_2$ crystallite size on the powder characteristics, the resistance in air and the sensitivity to 0.5 vol % $H_2$, CO-air mixture were observed. The size of SnO, powder was controlled by calcining temperature variation ($500^{\circ}C$ ~$1100^{\circ}C$) of $\alpha$-stannic acid fabricated from $SnCl_4 \cdot xH_2O$. Its crystallite size. evaluated from TEM image, was in the range of 8-54nm. With the reduction of crystallite size, the adsoption peak of $H_2O$ on FTIR curve became more clear while the lattice parameters were invariable. As the crystallite size decreased, with elements of thick film, the temperatures showing a minimum resistance in air and a maximum sensitivity to H, gas reduced. The temperature variations were assigned to the changes of activation energy of the active adsorbates, and it was suggested that the decrease of activation energy can be one of the reasons for the' sensitivity increase with the' fine powder.

Hydroxide법으로 ${\alpha}$-주산산(stannic acid)을 만든후, 하고온도를 $500^{\circ}C$~$1100^{\circ}C$로 조정하여 일차입자(Crystallite)크기가 8-54nm인 $SnO_2$ 분말을 제작하였다. 분말의 입자(drystalite)클기에 따른 분말특성와 $H_2$, CO가스(0.5v/o)에 대한 감응성 미치공기중에서의 저상변화특성에 미치는 영향을 조사하였다. 입자크기가 감소함에 따라, 분말의 FTIR 흡습특성은 증가하였으나, 격자상수는 일정하였다. 후막소자에서, $H_2$가스에 대해 최대감도를 나타내는 온도와 공기중에서 최소저항을 나타내는 온도는 입자크기가 미세해짐에 따라 점차 낮아졌다. 최소저항점과 최대감도점의 온도저하를 산소흡착종의 활성화에너지의 감소라고 유추하였고, 이러한 에너지의 감소가 미세입자에 의한 감도향상요인 중의 한가지라고 제의하였다.

Keywords

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