Journal of the Korean Physical Society

Korean Physical Society (한국물리학회)
권호 표지

A One-Dimensional Model for a TCP Discharge Including the Collisionless Electron Heating Mechanism

S. S. KIM;C. S. CHANG;N. S. YOON

  • Published : 1996.09.01

⟨ Previous Next ⟩

Abstract

We present a one-dimensional model for a transformer-coupled plasma (TCP) discharge, which includes both the collisional and the collisionless heating mechanisms. We investigate the one-dimensional heating and the transport properties of a TCP discharge in a self-consistent manner. It is found that a critical behavior in power coupling appears as the reactor length is changed. Thus, it is concluded that the reactor length should be larger than a critical length to obtain a sufficient power.

Keywords

References

  1. Phys. Rev. Lett. v.71 M. M. Turner
  2. J. Korean Phys. Soc. v.28 N. S. Yoon;S. S. Kim;C. S. Chang;Duk-In Choi
  3. J. Vac. Sci. Technol. B v.12 P. L. G. Ventzek;R. J. Hoekstra;M. J. Kushner
  4. J. Vac. Sci. Technol. B v.12 P. L. G. Ventzek;T. J. Sommerer;R. J. Hoekstra;M. J. Kushner
  5. J. Vac. Sci. Technol. B v.12 R. A. Stewart;P. Vitello;D. B. Graves
  6. J. Vac. Sci. Technol. A v.12 A. P. Paranjpe
  7. J. Vac. Sci. Technol. A v.12 G. Dipeso;V. Vahedi;D. W. Hewett;T. D. Rognlien
  8. Phys. Rev. E v.54 N. S. Yoon;S. S. Kim;C. S. Chang;Duk-In Choi
  9. Plasma Sources Sci. Technol. v.3 R. B. Piejak;V. A. Godyak;B. M. Alexandrovich
  10. Phys. of Fluids v.16 H. A. Blevin;J. A. Reynolds;P. C. Thonemann
  11. IEEE Trans. Plasma Sci. v.19 R. K. Porteous;D. B. Graves
  12. Phys. Lett. v.89A V. A. Godyak
  13. IEEE Trans. Plasma Sci. v.18 V. A. Godyak;N. Sternberg
  14. J. Vac. Sci.Technol. A v.11 J. Hopwood;C. R. Guarnier;S. J. Whitehair;J. J. Cuomo
  15. J. Vac. Sci.Technol. A v.11 J. Hopwood;C. R. Guarnier;S. J. Whitehair;J. J. Cuomo
  16. IEEE Trans. Plasma Sci. v.23 N. S. Yoon;Nak-Heon Choi;Hyung-Bin Park;Duk-In Choi