Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Determination of the complex refractive index and thickness of MNA/PMMA thin film

MNA/PMMA 고분자박막의 복소굴절율 및 두께결정

  • Published : 1996.12.01
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Abstract

The thickness and the spectrum of the complex refractive index in the region 1.5~4.5 eV, of an MNA/PMMA thin film fabricated by spin casting are determined. The film thickness and the refractive index in its transparent region is calculated by modeling the spectroscopic ellipsometry data. The extinction coefficient spectrum is obtained from the absorption spectrum in its non-transparent region. The best fit oscillator parameters of the classical Lorentz oscillator and a quantum mechanical oscillator are found. The complex refractive index spectrum by these oscillators are compared. The present technique can be applied to get the thickness and the complex refractive index of unknown polymer films and thus it will be useful in optical characterization of those films.

스핀 코팅으로 제작한 MNA/PMMA 고분자박막의 두께 및 굴절율과 소광계수를 결정하였다. 타원해석 스펙트럼을 분석하여 박막의 두께 및 투과영역에서의 굴절율을 결정하고 광흡수 스펙트럼으로부터 흡수영역에서의 소광계수 스펙트럼을 역방계산하였다. 이 소광계수 스펙트럼을 가장 잘 나타내는 고전적 Lorentz 진동자 상수들과 양자역학적 진동자 상수들을 각각 구하고 이들 진동자에 의한 복소굴절율 스펙트럼들을 비교하였다. 이 방법은 대부분의 고분자박막의 두께 및 굴절율과 소광계수 스펙트럼을 구하는데 적용될 수 있으며 고분자박막의 광학적 특성을 규정짓는데 매우 유용하게 사용될 수 있겠다.

Keywords

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