Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지

Microstructure and Magnetic Characteristics of Yttrium Iron Garnet Thin Films Prepared by RF Magnetron Sputter

고주파 마그네트론 스퍼터법에 의해 제조된 Yttrium Iron Garnet 박막의 미세구조 및 자기적 특성

  • 박명범 (인하대학교 무기 재료공학과) ;
  • 김병진 (인하대학교 무기 재료공학과) ;
  • 조남희 (인하대학교 무기 재료공학과)
  • Published : 1999.03.01
Download PDF
⟨ Previous Next ⟩

Abstract

고주파 마그네트론 스퍼터법을 이용한 YIG(yttrium iron garnet)박막 제조시 기판유형, 기판온도, 스퍼터전력, 스퍼터가스 등의 증착변수와 증착후 열처리 조건이 YIG 박막의 결정성, 화학조성, 미세구조 그리고 자기적 특성에 미치는 영향에 대하여 고찰하였다. 75$0^{\circ}C$ 이상의 온도에서 수행한 증착후 열처리에 의하여 비정질 박막이 결정화되었으며, 특히 GGG(gadolinium gallium garnet)기판 위에 제조된 박막은 강한 (111)우선배향성을 나타냈다. 박막조성은 스퍼터가스 내의 산소분율에 민감하게 영향을 받았으며, 산소분율이 20%인 스퍼터가스를 사용하여 제조된 박막은 Y2.88Fe3.84O12의 조성을 나타내었다. 증착후 열처리 온도가 90$0^{\circ}C$로부터 110$0^{\circ}C$로 증가함에 따라, GGG 기판위의 박막의 표면거칠기는 2.5nm에서 40nm로 증가하였으며, 보자력과 강자성 공명 선폭은 감소하였다.

Keywords

References

  1. Microwave Solid State Circuit Design I. Bahl
  2. Microwave Intergrated Circuit Y. Konishi
  3. J. Appl. Phys. v.55 Magnetic and Magneto-Optic Properties of Lead- and Bismuth-Substituted Yttrium Iron Garnet Films P. Hansen;K. Witter;W Tolksdorf
  4. J. Appl. Phys. v.70 Effect of Sodium Doping of Rare-earth Iron Garnet Films on Magnetic and Magneto-Optic Properties M. Ramesh;D. M. Gaultieri;S. D. Shilliman;J. Peruyero;D. D. Stancil
  5. J. Appl. Phys. v.57 rf Sputtering of Highly Bi-Substituted Garnet Films on Glass Substrates for Magneto-Optic Memory M. Gomi;T. Tanida;M. Abe
  6. J. Appl. Phys. v.70 Magneto-Optical Properties of Ca-Substituted Bi-YIG Sputtered Films T. Hirano;T. Namickawa;Y. Yamazaki
  7. J. Appl. Phys v.40 Some Magnetic and Structural Properties of Epitaxial Garnet Films Prepared by rf Sputtering E. Swatzky;E. Kay
  8. J. Appl. Phys. v.42 Magnetic and Structural Properties of Epitaxial and Polycrystalline GdIG Films Perpared by rf Sputtering E. Swatzky;E. Kay
  9. J. Appl. Phys. v.62 Magnetoelastical and Optoelastic Coupling in (111)- and (110)-Oriented Bistmuth-Iron Garnet Films Prepared by Sputter Epitaxy J. P. Krumme;V. Doormann;B. Streka;K. Witter
  10. J. Appl. Phys. v.70 Bismuth- and Aluminum-Substituted YIG Single Crystal Films on Modified Gadolinium Gallium Garnet Single Crystal Substrate K. Matsumoto;S. Sasaki;Y. Yamnobe;K. Yamaguchi;T. Fujii;Y. Asahara
  11. Jpn. J. Appl. Phys. v.27 Microstructure and $Bi_15Y_15Fe_5O_12$ Films Made by Pyrolysis J. Cho;M. Gomi;M. Abe
  12. J. Magn. Magn. Mater v.169 Annealing Dependence of Magnetic Properties in Nanostructured of Yttrium Iron Garnet Prepared by Citrate Gel Process P. Vaqueiro;M. A. Lopez-Quintela;J. Rivas;J. M. Grenche
  13. Nucl. Inst. Meth. v.B9 Algorithms for the Rapid Simulation of Rutherford Backscattering Spectra L. R. Doolittle
  14. J. Vac.Sci. Technol. v.17 Discharge Characteristics for Magnetron Sputtering of Al in Ar and Ar/O₂ Mixtures S. Maniv;W. D. Westwood
  15. J. Vac. Sci. Technol. v.A16 In Situ Sputter Deposition Discharge Diagnostics for Tailoring Ceramic Film Growth C. R. Aita
  16. Thin Solid Films v.290 Influence of Oxygen on Some Oxide Films Prepared by Ion Beam Sputter Deposition C.-C. Lee;D. T. Wei;J.-C. Hsu;C.-H. Shen
  17. Surf. Coat. Technol. v.97 Studies of the Evolution of the Topography of Selected Materials as a Function of Etching in Reactive and Non-Reactive rf Plasmas C.-A. Anderson;N. M. D. Brown;N. Cui;Z. Liu;A. Mckinley;C. G. H. Walker
  18. Thin Solid Films v.305 Thin Film Deposited by Reactive Magnetron Sputtering:On the Influence of Target Oxidation and Its Effect on Surface Properties D. Rhhde;H. Kersten;C. Eggs;R. Hippler
  19. J. Appl. Phys. v.69 Studies on Glow-Discharge Characteristics during de Reactive Magnetron Sputtering G. Mohan Rao;S. Mohan
  20. Surf. Coat. Technol. v.94 Reactive Sputter Deposition of Indium Tin Oxide Films onto Polymeric Webs Using Optical Emission Monitoring and Control H. Patel;M. Saif;H. Memarian
  21. Phys. Stat. Sol. v.155 Influence of Oxygen Partial Pressure and Heat Treatment on the Properties of Reactively Sputtered In₂O₃ Films M. K. Jayaraj;S. Loreti;A. Agati;A. Parretta
  22. CRC Handbok of Chemistry and Physics (74th Edition) D. R. Lide
  23. J. Appl. Phys. v.55 Annealing Effects and Charge Compensation Mechanism in Calcium-Doped $Y_3Fe_5O_12$ Films W. H. de Roode;C. A. P. W. van de Pavert