Journal of the Korean Magnetics Society (한국자기학회지)

The Korean Magnetics Society (한국자기학회)
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A Study on the Magnetic Properties and Microstructures of Mn-Ir/Ni-Fe/Zr Muti layers with Various Compositions, Thicknesses and Base Pressures

Mn-Ir의 조성과 두께 및 초기진공도에 따른 Mn-Ir/Ni-Fe/Zr 다층막의 자기적특성과 미세구조 연구

  • 노재철 (성균관대학교 금속공학과) ;
  • 최영석 (성균관대학교 금속공학과) ;
  • 이경섭 (성균관대학교 금속공학과) ;
  • 김용성 (성균관대학교 금속공학과) ;
  • 서수정 (성균관대학교 금속공학과)
  • Published : 1999.06.01
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Abstract

The magnetic properties between Mn-Ir antiferromagnetic layer and Ni-Fe ferromagnetic layer have been investigated in Mn-Ir/Ni-Fe/Zr on Si wafer formed by magnetron sputtering. Mn-Ir was sputtered from Ir chips and Mn target using D.C. power, Ni-Fe and Zr were deposited from Ni-Fe and Zr targets using D.C. power under Ar atmosphere. We studied the dependence of the magnetic properties on Ir content of Mn-Ir layer for Mn-Ir/Ni-Fe bilayer, and obtained the highest $H_ex$ of 219 Oe and the low $H_c$ of 30 Oe. And then focused on the effect of base pressure for Mn-Ir containing multilayers. Our experimental data showed that if the base pressure is higher than $3.0{\times}10^{-6}\;Torr$, the exchange anisotropy of Mn-Ir/Ni-Fe/Zr disappeared probably due to the grain refining of Mn-Ir film. In addition we have studied the dependence of Zr buffer on magnetic properties of Mn-Ir/Ni-Fe/Zr multilayers, and observed that Zr buffer about (111) texture and lower $H_c$ of Mn-Ir/Ni-Fe/Zr multilayer.

본 연구에서는 마그네트론 스퍼터링 법으로 제작한 Mn-Ir/Ni-Fe/Zr/Si 다층막에서 Mn-Ir의 조성과 증착조건을 변화시키고 또한 Mn-Ir층의 두께를 조절한 후 자기적 특성과 미세구조에 대하여 고찰하였다. Mn-22at% Ir의 조성에서 219Oe의 가장 높은 Hex와 30Oe의 낮은 Hc를 얻을 수 있었다. 초기진공도가 3.0$\times$10-6Torr 이상 일때는 교환이방성이 사라지게 되었으며 이것은 Mn-Ir의 비정질화와 결정립미세화에 의한 것으로 판단된다.

Keywords

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