Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Residual Stress Measurement of Micro Gold Electroplated Structure

마이크로 금 전해 도금 구조물의 잔류응력 측정

  • 백창욱 (서울대학교 3차원 밀리미터파 연구단) ;
  • 안유민 (한양대학교 기계공학과)
  • Published : 2000.12.01
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Abstract

In order to find a residual stress in the micro-machined beam, first natural frequency of the beam that has the residual stress inside is analyzed using the Rayleigh's energy method. Micro gold electroplated structure is fabricated by surface micro-machining process. The made structure is clamped-clamped beam and its 1st natural frequency is measured by resonance method. For the better estimation of the residual stress, an equivalent length of micro-machined beam to ideal beam is calculated by FEM. The residual stress is estimated from the equivalent length and the measured natural frequency.

Keywords

References

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