Transactions on Electrical and Electronic Materials
- Volume 1 Issue 2
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- Pages.18-22
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- 2000
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- 1229-7607(pISSN)
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- 2092-7592(eISSN)
Evaluation of Ozone Condensation System by T.D Method
- Lee, Hee-Kab (Department of Electrical and Electronic Engineering, Dongshin University) ;
- Park, Yong-Pil (Department of Electrical and Electronic Engineering, Dongshin University)
- Published : 2000.06.01
Abstract
An ozone condensation system is evaluated from the viewpoint of an ozone supplier fro oxide thin film growth. Ozone is condensed by the adsorption method and its concentration is analyzed using the thermal decomposition method, The concentration of ozone exceeds 90mol% and ozone is supplied for a sufficiently long time to grow oxide thin films. Investigation of the ozone decomposition rate demonstrates that ozone can be transferred into the film growth chamber without marked decomposition. The ozone concentration is also evaluated using a quardrupole mass analyzer and the accuracy of this method is compared with the results of the thermal decomposition method.
Keywords
- ozone condensation system;
- thermal decomposition method;
- ozone decomposition rate;
- ozone concentration;
- quardrupole mass analyzer