Korean Journal of Air-Conditioning and Refrigeration Engineering (설비공학논문집)

The Society of Air-Conditioning and Refrigerating Engineers of Korea (대한설비공학회)
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Analysis of two-dimensional flow fields in the multi-stage turbomolecular pump using the DSMC method

DSMC법을 이용한 터보분자펌프 다단 익렬의 2차원 유동장 해석

  • 황영규 (성균관대학교 기계공학부) ;
  • 허중식 (성균관대학교 기계설계학과 대학원) ;
  • 박종윤 (성균관대학교 물리학과)
  • Published : 2000.01.01
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Abstract

The performance of a turbomolecular pump(TMP) in both molecular and transition flow regions is predicted by the numerical solutions of the Boltzmann equation obtained by the direct simulation Monte Carlo method. The compression characteristics of the TMP are investigated for a wide range of the Knudsen number( Kn ). The maximum compression ratios strongly depend on Kn in transition region, while do they weakly on Kn in free molecular flow region. The present numerical results of the single blade row in both molecular and transition regions are used to predict the overall performance of a TMP, which has three kinds of blade with 24-rows.

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References

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