Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Performance Analysis of a Vibrating Microgyroscope using Angular Rate Dynamic Model

진동형 마이크로 자이로스코프의 각속도 주파수 동역학적 모델의 도출 및 성능 해석

  • Hong, Yoon-Shik (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Lee, Jong-Hyun (Dept. of Mechatronics, Gwangju Institute of Science and Technology) ;
  • Kim, Soo-Hyun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 홍윤식 (한국과학기술원 기계공학과) ;
  • 이종현 (광주과학기술원 기전공학과) ;
  • 김수현 (한국과학기술원 기계공학과)
  • Published : 2001.01.01
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Abstract

A microgyroscope, which vibrates in two orthogonal axes on the substrate plane, is designed and fabricated. The shuttle mass of the vibrating gyroscope consists of two parts. The one is outer shuttle mass which vibrates in driving mode guided by four folded springs attached to anchors. And the other is inner shuttle mass which vibrates in driving mode as the outer frame does and also can vibrate in sensing mode guided by four folded springs attached to the outer shuttle mass. Due to the directions of vibrating mode, it is possible to fabricate the gyroscope with simplified process by using polysilicon on insulator structure. Fabrication processes of the microgyroscope are composed of anisotropic silicon etching by RIE, gas-phase etching (GPE) of the buried sacrificial oxide layer, metal electrode formation. An eletromechanical model of the vibrating microgyroscope was modeled and bandwidth characteristics of the gyroscope operates at DC 4V and AC 0.1V in a vacuum chamber of 100mtorr. The detection circuit consists of a discrete sense amplifier and a noise canceling circuit. Using the evaluated electromechanical model, an operating condition for high performance of the gyroscope is obtained.

Keywords

References

  1. J.Bernstein, S.Cho, A.T.King, A.Kourepenis, P.Maciel and M.Weinberg, 'A Micromachined Comb-drive Tuning Fork Rate Gyroscope,' Digest IEEE/ASME Micro ElectroMechanical Systems (MEMS) Workshop, Ft. Lauderdale, pp. 143-148, Feb. 1993 https://doi.org/10.1109/MEMSYS.1993.296932
  2. K. Tanaka, Y. Mochida, S. Sugimoto, K. Moriya, T. Hasegawa, K. Atsuchi and K. Ohwada, 'A Micromachined Vibrating Gyroscope,' Proceedings IEEE MicroElectroMechanical Systems, Amsterdam, Netherlands, pp. 278-281, Jan. 1995
  3. T. Juneau and A. P. Pisano, 'Micromachined Dual Input Axis Angular Rate Sensor,' Solid-State Sensor and Actuator Work shop, Hilton Head, South Carolina, pp. 299-302, June 1996
  4. W. A. Clark, R. T. Howe and R. Horowitz, 'Surface Micromachined Z-Axis Vibratory Rate Gyroscope,' Solid-State Sensor and Actuator Work shop, Hilton Head, South Carolina, pp. 283-287, June 1996
  5. O. Degani, D. J. Seter, E. Socher, S. Kaldor and Y. Nemirovsky, 'Oprimal Design and Noise Consideration of Micro machined Vibrating Rate Gyroscope with Modulated Integrative Differential Optical Sensing,' Journal of MicroElectroMechanical Systems, Vol. 7, No. 3, pp. 329-338, 1998 https://doi.org/10.1109/84.709652
  6. F. Ayazi and K. Njafi, 'Design and Fabrication of A High Performance Polysilicon Vibrating Ring Gyroscope,' Proceedings IEEE MicroElectroMechanical Systems, Heidelberg, Germany, pp. 621-626, Jan. 1998 https://doi.org/10.1109/MEMSYS.1998.659829
  7. W. Geiger, B. Folkmer, J. Merz H. Snadmaier and W. Lang, 'A New Silicon Rate Gyroscope,' Proceedings IEEE MicroElectroMechanical Systems, Heidelberg, Germany, pp. 615-620, Jan. 1998 https://doi.org/10.1109/MEMSYS.1998.659828
  8. S. An, Y.S. Oh, B. L. Lee, K. Y. Park, S. J. Kang, S. O. Choi, Y. I. Go and C. M. Song, 'Dual-Axis Microgyroscope with Closed-Loop Detection,' Proceedings IEEE MicroElectroMechanical Systems, Heidelberg, Germany, pp. 328-333, Jan. 1998 https://doi.org/10.1109/MEMSYS.1998.659777
  9. J. H. Lee, W. I. Jang, C. S. Lee, Y. I. Lee, C. A. Choi, J. T. Baek and H. J. Yoo, 'Characterization of anhydrous HF gas-phase etching with CH₃OH for sacrificial oxide removal,' Sensor and Actuator A 64, pp. 27-32, 1998 https://doi.org/10.1016/S0924-4247(98)80054-X