Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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An Inductive Micro Position Sensign System and Analysis of its Response Characteristics

인덕턴스형 미소 변위 측정 시스템과 응답 특성의 분석

  • Choi, Dong-Jun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Choi, In-Mook (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kim, Soo-Hyun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 최동준 (한국과학기술원 기계공학과) ;
  • 최인묵 (한국과학기술원 기계공학과) ;
  • 김수현 (한국과학기술원 기계공학과)
  • Published : 2001.03.01
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Abstract

This paper presents a mew design of an inductive position sensing system with high sensitivity. The designed system consists of the driving coils, position-detecting coils, and closed loop formed magnetic blocks. To obtain high sensitivity we design a symmetric and closed loop type measuring system with small air-gaps. The elements that affect the system characteristics are turn ratio, excitation frequency, air-gap size, capacitance effect, and load resistance. By experimental investigation, the influences of these elements are examined and the system parameters are selected. The sensitivity of the newly designed system is greater than 2800mV/(V mm) and the linearity error is below${\pm}0.01%; in; the; range; of; {\pm}200{\mu}m$.

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References

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