Abstract
ZnO films were fabricated on p-type Si(100) wafer ITO glass and quartz glass by the sol-gel process using zinc acetate dihydrate as starting material. A homogeneous and stable solution was prepared by dissolving the zinc acetate dihydrate in a solution of 2-methoxyethanol and monoethanolamine (MEA). ZnO films were deposited by spin-coating at 2800 rpm for 25 s and were dried on a hot plate at $250^{\circ}C$ for 10 min. Crystallization of the films was carried out at $400^{\circ}C$~$800^{\circ}C$ for 1 h in air. X-ray diffraction (XRD) analysis, scanning electron microscopy (SEM), UV-vis transmittance spectroscopy, FTIR transmittance spectroscopy and Photoluminescence (PL) spectroscopy measurements have been used to study the structural and optical properties of the films. ZnO films highly oriented along the (002)plane were obtained. In all cases the films were found to be transparent (above 70%) in visible range with a sharp absorption edge at wavelengths of about 380nm, which is very close to the intrinsic band-gap of ZnO(3.2 eV). The low temperature band-edge photoluminescence revealed a complicated multi-line structure in terms of bound exciton complexes and the phonon replicas.
sol-gel방법에 의해서 p-형 Si(100)웨이퍼와 ITO glass, quartz glass기판 위 ZnO박막을 형성시켰으며 출발 물질은 zinc acetate dihydrate를 사용하였다. Zinc acetate dihydrate를 2-methoxyethanol-monoethanolamine(MEA)용액에 녹여 :균질하고 안정된 용액을 만들었다. ZnO박막은 2800rpm에서 25초 동안 spin-coating하고 $250^{\circ}C$의 hot plate에서 10분 동안 중간 열처리한 후 이를 반복하여 형성시켰고 결정화를 위한 열처리는 $400^{\circ}C$~$800^{\circ}C$공기 분위기에서 1시간 동안 시행하였다. X-ray diffraction(XRD), scanning electron microscopy(SEM), UV-vis 투과 스펙트럼, IR 투과 스펙트럼, photoluminescence(PL)스펙트럼 등의 측정 결과로부터 박막의 구조적 특성과 광학적 성질에 대해서 논의하였다. 제조된 ZnO막은 (002)면으로 정렬되어 있으며 380nm파장에서 예리한 흡수단이 있고 가시광선 영역에서 투명(투과율 70% 이상)하였는데 이 흡수단은 ZnO의 밴드 갭(3.2eV)과 잘 일치한다. 저온에서의 띠끝 PL스펙트럼은 속박된 엑시톤 복합체와 포논 복제에 의한 다중선 구조를 보인다.
