Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
권호 표지
DOI QR코드

DOI QR Code

Analysis of Dynamic Behavior of Piezoelectric Atomic Force Microscope Cantilever

압전형 AFM 외팔보의 동적거동 해석

  • 하성규 (한양대학교 기계공학부) ;
  • 박성균 (한양대학교 대학원 기계설계학과) ;
  • 김영호 (한양대학교 대학원 기계설계학과)
  • Published : 2002.03.01
Download PDF
⟨ Previous Next ⟩

Abstract

A seven-port impedance and admittance matrices of multilayered piezoelectric beam are derived for the analysis of piezoelectric AFM ( atomic force microscope) cantilever that is partially covered by the piezoelectric layer. The variational principle is used for deriving the extensional and flexural motional equations and the conjugate parameters. Overall impedance matrix of AFM cantilever can be obtained by combining two impedance matrices of the covered and the non-covered. she resonance and antiresonance frequencies and the effective electromechanical coupling factors are calculated using the derived matrices. The results and the three dimensional finite element solutions are compared with the experimental results in other publication.

Keywords

References

  1. Journal of Microelectromechanical Systems v.7 no.1 Low-stiffness Silicon Cantilevers wity Intergrated Heaters and Piezoresistive Sensors for High-density AFM Thermomechanical Data Strorage Chui, B. W.(et al.) https://doi.org/10.1109/84.661386
  2. MEMS '99 12th IEEE International Conference on Micro Electro Mechanical Systems VLSE-NEMS chip for AFM Data Stroage Despont. M(et al.)
  3. 제5회 대한전기학회 MEMS 심포지움 논문집 v.3 no.1 Nano Data Storage용 PZT Cantilever의 제작 및 특성 평가 남효진;조성문;김영식;김동천;부종욱;홍제완
  4. Sensors and Actuators A v.48 Tip-based Data Storage Using Micromechanical Cantilevers Mamin, H. J.;Fan, L. S.;Hoen, S.;Rugar, D https://doi.org/10.1016/0924-4247(95)01001-7
  5. Proceedings of the IEEE v.87 no.6 High Density Data Storage Based on the Atomic Force Microscope Mamin, H. J.;Ried, R. P.;Terris, B. D.;Ruger, D https://doi.org/10.1109/5.763314
  6. IEEE the 9th Anuual International Workshop on Structures, Sensors, Actuators, Machines and System Piezoelectric Microcantilever Array for Multiprobe Scanning Force Microscopy Itoh, T;Ohashi, T.;Suga, T.
  7. IEICE Trans. Electron. v.E80 no.c Piezoelectric Microcantilever Array for Multiprobe Scanning Force Microscopy Itoh, T.;Azumi, R.;Suga, T.
  8. Journal of Applied Physics v.82 no.3 High-Frequency Response of Atomic-force Microscope Cantilevers Turner J. A.;Hisekorn S.;Rabe U.;Arnold W. https://doi.org/10.1063/1.366536
  9. Sensors and Actuators v.28 The constituent Equations of Piezoelectric Bimorphs Smits, J. G.;Dalke, S. L.;Cooney, T. K. https://doi.org/10.1016/0924-4247(91)80007-C
  10. Journal of Microelcetromechanical Systems v.3 no.3 Dynamic Admittance Matrix of Piezoelectric Cantilever Bimorphs Smits, J. G.;Ballato, A. https://doi.org/10.1109/84.311560
  11. IEEE Transaction on UItrasonics, Ferroelectrics, and Frequency Control v.44 no.2 Resonance and Antiresonance of Symmetric and Asymmetric Cantilevered Piezoelectric Flexors Smits, J. G.;Choi, W.;Ballato, A. https://doi.org/10.1109/58.585110
  12. IEEE Transaction on UItrasonics, Ferroelectrics, and Frequency Control v.46 no.2 Electromechanical Analysis of and Asymmetric Piezoelectri/elastic Laminate Structure : Theory and Experiment Chang, S. H.;Chou, C. C. https://doi.org/10.1109/58.753033
  13. Sensors and Actuators A v.72 Self-excited Piezoelectri PZT Microcantilevers for Dynamic SFM-with Inhereot sensing and ActuatingCapabilities Lee, C.;Itch, T.;Suga,T. https://doi.org/10.1016/S0924-4247(98)00212-X
  14. IEEE Standard On Piezoelectricity ANSI/IEEE Std. 176-1987
  15. ANSYS User's Manual ANSYS
  16. IEEE Transaction on Sonics and Ultrasonics v.SU-28 Computation of the Vibrasional Modes for Piezoelectric Array Transducer Using a Mixed Fivite Element-perturbation Method Boucher, D.;Lagier, M.;Maerfeld, C.