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Finite Element Analysis of Adhesive Contact of Torus-Shaped Bumps

토러스형 돌기의 흡착접촉 유한요소해석

  • 조성산 (홍익대학교 기계 시스템디자인공학과) ;
  • 양승민 (홍익대학교 대학원 기계공학과)
  • Published : 2002.08.01

Abstract

Adhesive contact characteristics of torus-shaped bumps were analyzed using the finite element technique considering the adhesive force. Analyses focused on the effect of rim and bump radii on the adhesive contact behavior such as the jump-to-contact behavior, adhesion hysteresis, pull-off forces, contact region and pressure, and surface and subsurface stresses. Analysis results in the absence of adhesive force were also included to examine the effect of adhesive force. The applicability of torus-shaped bumps to the MEMS structure for reduction of friction is discussed.

Keywords

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