Development of Optical Fiber Coupled Displacement Probe Sensor with a New Compensation Method

보상법을 적용한 광섬유 변위센서의 개발

  • ;
  • ;
  • ;
  • P. Sainsot (LMC, INSA-Lyon) ;
  • L. Flamand (LMC, INSA-Lyon) ;
  • Published : 2002.12.01

Abstract

The intensity modulated type (reflective method) optical fiber sensor is a well -known method and widely applied to the displacement measurements and other industrial purposes. This type sensor has the advantages of relatively cheap cost, small sensor size and easiness of operation. The sensitivity of the sensor is very dependent of several error terms; the variation in the intensity of the light source and the changes in the surface reflectivity of the object. An optical fiber coupled displacement probe with a new compensation method is presented in this paper. The proposed displacement sensor can measure the displacements of the target surface independent of surface reflectivity error that is caused by the materials and surface processing grade.

Keywords

References

  1. Ernest O. D., 'Measurement System,' McGraw-Hill Book co., USA, 1990
  2. Thomas T. R., 'Trends in Surface Roughness,' Int. J. Mech. Tools Manufact., Vol. 38, pp. 405-411, 1998 https://doi.org/10.1016/S0890-6955(97)00084-9
  3. Udupa G., M., Sirohi R. S. and Kothiyal M. P., 'Characterization of surface topography by confocal microscopy,' Meas. Sci. Technol., Vol. 11, pp. 315-329, 2000 https://doi.org/10.1088/0957-0233/11/3/321
  4. Haronian, D., 'Displacement sensing using geometrical modulation in reflection mode (GM-RM) of coupled optical waveguides,' J. of Micromechanics and Microengineering, vol.8, pp. 323-326, 1998 https://doi.org/10.1088/0960-1317/8/4/010
  5. 김승우, 'Precision Engineering metrology,' 정밀측정공학교재, KAIST, 1995
  6. Murphy P. J. and Coursolle T. P., 'Fiber optic displacement sensor employing graded index lens,' Appl. Opt., Vol. 29, No. 4, p. 544, 1990 https://doi.org/10.1364/AO.29.000544
  7. R. Brodmann, G. Rodenstock, and G. Thurn, 'An optical instrument for measuring the surface roughness in production control,' Ann. CIRP, Vol. 33, No. 1, p. 403, 1984 https://doi.org/10.1016/S0007-8506(07)61451-6
  8. Katsuhoru Lwamoto et al., 'Liquid-Level Sensor Optical Fiber,' Appl. Opt., Vol. 31, No. 1, pp. 51-54, 1992 https://doi.org/10.1364/AO.31.000051
  9. Kjell J. Gasvik, 'Light propagation through optical fibers,' Optical metrology, Vol. 2, pp. 277-278, 1995