DOI QR코드

DOI QR Code

Dynamics of a Micro Three-axis Ring Gyroscope

마이크로 3축 링 자이로스코프의 동역학

  • 최상현 (인하대학교 대학원 자동화공학과) ;
  • 김창부 (인하대학교 기계공학부)
  • Published : 2002.12.01

Abstract

In this paper, we analyse and present mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. The equations of motion, the response to angular velocities, and the relationships between the natural modes of vibration are derived and compared with the previous studies for the design of a micro three-axis ring gyroscope.

Keywords

References

  1. Yazdi, N.. Ayazi, F. and Najafi, K., 1998, 'Micromachined Inertial Sensors.' Proc. IEEE, Vol. 86, No. 8, pp. 1640-1659 https://doi.org/10.1109/5.704269
  2. Putty. M. W. and Najafi, K., 1994, 'A Micromachined Vibrating Ring Gyroscope.' Tech. Dig. Solid-state Sensor and Actuator Workshop. Hilton Head Island, SC. pp. 213-220
  3. Putty, M. W.. 1995. 'A Micromachined Vibrating Ring Gyroscope,' Ph. D. Thesis. University of Michigan, Ann Arber
  4. Ayazi, F. and Najafi, K., 1998, 'Design and Fabrication of a High-performance Polysilicon Vibrating Ring Gyroscope,' Proc. IEEE Micro Electro Mechanical Systems Workshop. Heidelberg, Germany. pp. 621-626
  5. Ayazi, F.. 2000. 'A High Aspect-ratio High-performance Poly silicon Vibrating Ring Gyroscope,' Ph. D. Thesis, University of Michigan, Ann Arber
  6. Eley. R., Fox. C. H. J. and McWilliam. S., 2000, 'Coriolis Coupling Effects on the Vibration of Rotating Rings,' Journal of Sound and Vibration. Vol. 238(3). pp. 459-480 https://doi.org/10.1006/jsvi.2000.3154
  7. Gallacher, B. J., Burdess. J. S. Harhs, A. J and McNie, M. E., 2001. 'Principles of a Three-axis Vibrating Gyroscope,' IEEE Transactions on Aerospace and Electronic Systems, Vol. 37, No. 4, pp. 1333-1343 https://doi.org/10.1109/7.976969
  8. Thomas, D. L., 1979, 'Dynamics of Rotationally Periodic Structures,' International Journal for Numerical Methods in Engineehng, Vol. 14, pp. 81-102 https://doi.org/10.1002/nme.1620140107
  9. 김창부, 안영철, 2000, '송풍기 임펠러의 순환 대칭성을 이용한 고유치해석.' 한국소음진동공학회논문집, 제 10권, 제 3호, pp. 523-530
  10. Cowper. G. R., 1966, 'The Shear Coefficient in Timoshenko's Beam Theory,' Journal of Applied Mechanics, Vol. 33, pp. 335-340 https://doi.org/10.1115/1.3625046
  11. Sokolnikoff, I. S., 1956, Mathematical Theory of Elasticity, McGraw-Hill, New York