Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Electrical Properties of YMnO3 Thin Film by Sol-gel Process

졸-겔 공정에 의한 YMnO3 박막의 전기적 특성

  • Kim, Eung-Soo (Department of Materials Engineering, Kyonggi University) ;
  • Kim, Beng-Gu (Department of Materials Engineering, Kyonggi University) ;
  • Kim, Yoo-Taek (Department of Materials Engineering, Kyonggi University)
  • Published : 2002.01.01
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Abstract

Hexagonal $YMnO_3$ thin films were prepared from $Y(NO_3)_3{\cdot}5H_2O$ and $Mn(CH_3CO_2)_2{\cdot}4H_2O$ as starting materials on the Si(100) substrates by the sol-gel method. The crystal structure and the electrical properties of the $YMnO_3$ thin films were investigated as a function of heat treatment temperature, the amount of water(Rw) of hydrolysis and the addition of catalysis. The crystallization of the $YMnO_3$ thin film began at 700${\circ}C$ and completed at 800${\circ}C$ for 1 h. The c-axis (0001) preferred orientation of hexagonal $YMnO_3$ was detected for the $YMnO_3$ thin films with Rw=6 and that was decreased for the $YMnO_3$ thin films with Rw=1 and Rw=12. The crystallinity and preferred orientation of the $YMnO_3$ thin films were depended on the addition of acid and/or alkali catalysis, which, in turn, the preferred orientation of c-axis was decreased and the orthorhombic phase of $YMnO_3$ was detected to the specimens with the addition of catalysis. The $YMnO_3$ thin film with Rw=6 showed good leakage current density of $1.2{\times}10-8 A/cm^2$ at the applied voltage of 0.2V and the leakage current density was not changed drastically with applied voltage.

$Y(NO_3)_3{\cdot}5H_2O$ 과 $Mn(CH_3CO_2)_2{\cdot}4H_2O$를 출발물질로 하여 졸-겔(sol-gel)법으로 Si(100) 기판위에 육방정계의 $YMnO_3$ 박막을 제조하였다. $YMnO_3$ 박막의 열처리 온도변화, 가수분해시 가수의 양(Rw)과 촉매제의 첨가에 따른 결정 구조 및 전기적 특성을 조사하였다. $YMnO_3$ 박막의 결정화는 700${\circ}C$부터 시작되었고 완전한 결정화는 800${\circ}C$-1시간 열처리하여 이루어 졌으며, $YMnO_3$ 박막의 가수의 양 Rw=6일때 육방정계 $YMnO_3$상의 c-축 (0001) 우선 배향성을 나타내었고, Rw=1 과 Rw=12인 경우에는 Rw=6인 경우보다 c-축 배향성은 감소하였다. 산성이나 염기성 촉매제 첨가에 따라 $YMnO_3$ 박막의 결정성 및 우선 배향성은 영향을 받아 c-축 우선 배향성은 감소하고 사방정계의 $YMnO_3$ 상을 형성하였다. Rw=6일 때 $YMnO_3$박막은 0.2V인가 전압에서 $1.2{\times}10-8 A/cm^2$으로 우수한 누설 전류 밀도를 나타내었고 누설 전류 밀도는 인가 전압에 따라 크게 변하지 않았다.

Keywords

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