Tribology and Lubricants

Korean Tribology Society (한국트라이볼로지학회)
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Nanotribological Characteristics of Silicon Surfaces Modified by IBAD

IBAD로 표면개질된 실리콘 표면의 나노 트라이볼로지적 특성

  • 박지현 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 양승호 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 공호성 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 장경영 (한양대학교 기계공학부) ;
  • 윤의성 (한국과학기술연구원 트라이볼로지 연구센터)
  • Published : 2002.02.28
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Abstract

Nano adhesion and friction between a $Si_{3}N_{4}$ AFM(atomic force microscope) tip and thin silver films were experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM and LFM(lateral force microscope) modes in various range of normal loads. Thin silver films deposited by IBAD (ion beam assisted deposition) on Si-wafer (100) and other Si-wafers of different surface roughness were used. Results showed that nano adhesion and friction decreased with the surface roughness. When the Si surfaces were coated by pure silver, the adhesion and friction decreased. But the adhesion and friction were not affected by the thickness of IBAD silver coating. As the normal force increased, the adhesion forces of bare Si-wafer and IBAD silver coating film remained constant, but the friction forces increased linearly. Test results suggested that the friction was mainly governed by the adhesion as long as the load was low.

Keywords

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