$CF_4$ Decomposition by Thermal Plasma Processing

References

1. Breitbarth, F. W., Berg, D., Dumke, K. and Tiller, H. J., ' Investigation of the Low-Pressure Plasma-Chemical Conversion of Fluorocarbon Waste Gases.' Plasma Chemistry and Plasma Processing, 17, 39 (1997) https://doi.org/10.1007/BF02766821
2. Chen, D.T., David, M. M., TIers, G. V. D. and Schroepfer, J. N., ' A Carbon Arc Process for Treatment of $CF_{4}$ Emissions.' 32, 3237 (1998)
3. Kunihihiko, K., Tatsu, F., Schizuichi, F. and Manabu, S., ' Study of $CF_{4}$, $C_{2}F_{6}$, $SF_{6}$ and $NF_{3}$ Decomposition Characteristics and Etching Performance in Plasma State.' Jpn. J. Appl. Phys., 36, 5274 (1996)
4. Kyoto Protocol, Climate Change Conference, Kyoto, Japan, Dec. 1-10(1997)
5. Oh, S.-M. and Park, D.-W., ' Preparation of Ultra-fine Alumina Powders by D. C. Plasma Jet.' Korean J. Chem. Eng., 17(3), 299(2000) https://doi.org/10.1007/BF02699044
6. Rarishankara, Solomon, S., Turnipseed, A. A. and Warren, R. F., ' Atmospheric Lifetimes of Long Lived Halogenated Species.' Science, 259, 194 (1993) https://doi.org/10.1126/science.259.5092.194
7. Wofford, B. A., Jackson, M. W., Hartz, C. and Bevan, J. W., ' Surface Wave Plasma Abatement of $CHF_{3}$ and $CF_{4}$ Containing Semiconductor Process Emissions.' Environ. Sci. Technol., 33, 1892 (1999) https://doi.org/10.1021/es9805472