Journal of the Institute of Electronics Engineers of Korea SD (대한전자공학회논문지SD)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Theoretical Analysis of Bragg-Reflector Type FBAR with Resonance Mode

공진 모드에 따른 Bragg-Reflector Type FBAR 의 이론적 분석

  • 조문기 (Hynix 반도체 연구원) ;
  • 윤영섭 (인하대학교 전자전기공학부 전자공학과)
  • Published : 2003.11.01
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Abstract

Two configurations of Film Bulk Acoustic Wave Resonators with acoustic quater-wave bragg reflector layers are theoretically analyzed using equivalent circuits and the difference of their characteristics are discussed. We compare the characteristics of λ/2 mode to those of ideal FBAR with top and bottom electrode contacting air and the characteristics of λ/4 mode to those of ideal FBAR with top electrode contacting air and bottom electrode clamped. We assume that the piezoelectric film is ZnO, the electrode is A1 and the substrate is Si, ABCD parameters are extracted and input impedance is calculated by converting the equivalent circuit from Mason equivalent circuits to the simplified equivalent circuits that ABCD parameters are extracted possible, From the variation of resonance frequency due to the change of thickness of reflector layers and the variation of electrical Q due to the change of mechanical Q of reflector layers, it is confirmed that the reflector layer just under the bottom electrode have the greatest effect on the varation of resonance frequency and electrical Q. It is shown that the number of reflector layers required for the saturation of electrical Q decreases with the increase of the impedance ratio of reflector layers and electrical Q of λ/2 mode is larger than that of λ/4 mode, Electromechanical coupling factor is independent of the number of layers, The impedance ratio of reflector layers becomes larger as the electromechanical coupling factor becomes larger, The electromechanical coupling factor of the two mode are smaller than those of ideal FBARs because of the trapping of acoustic energy in the reflector layers, The insertion loss of the ladder filter decreases with the increase of the number of reflector layers but the bandwidth is not affected much by the number of reflector layers, As the impedance ratio of reflector layers becomes larger the insertion loss becomes smaller and the bandwidth becomes wider, In our analysis of the two mode, characteristics of λ/2 mode appear to be slightly more favorable than that of λ/4 mode

본 논문에서는 λ/4 반사층으로 이루어진 체적 탄성파 공진기의 두 가지 유형을 등가회로를 이용하여 이론적으로 분석하고 두 유형의 차이점을 비교 논의하였다. λ/2 모드는 상, 하부전극이 공기와 접하는 이상적인 공진기와 λ/4 모드는 상부전극은 공기와 접하고 하부전극 아래는 완전히 막혀 있는 이상적인 공진기와 비교하여 반사층이 공진특성에 미치는 영향을 분석하였다. 압전층으로는 ZnO 를 전극층으로는 Al 을 기판층은 Si 을 사용하였다. Mason 등가회로를 ABCD 파라미터를 추출할 수 있는 단순화된 등가회로로 변환하여 입력임피던스를 구하였다. 반사층의 두께 변화에 의한 공진주파수의 변화와 반사층의 기계적 Q 에 따른 전기적 Q 의 변화를 통해 하부전극 바로 아래의 반사층의 변화률이 제일 큼을 알 수 있었다. 반사층의 탄성 임피던스비가 증가함에 따라 Q 의 포화에 필요한 반사층의 수가 감소하였고 동일한 반사층 조건에서 λ/2 모드의 전기적 Q 가 λ/4 모드의 전기적 Q 보다 다소 크다는 사실을 확인하였다. 전기기계결합계수는 반사층수에 독립적이었고 반사층의 탄성 임피던스비가 증가함에 따라 증가하였다. 두 모드 모두 전기기계결합계수는 반사층에 탄성파 에너지의 존재로 인하여 이상적인 공진기보다 낮고 동일한 반사층 조건에서 λ/2 모드가 λ/4 모드보다 큼을 확인하였다. Ladder 필터 특성에는 반사층수가 증가할수록 삽입손실은 감소하지만 대역폭에는 큰 변화가 없었고 반사층의 탄성임피던스비가 높을수록 동일한 반사층수에서 삽입손실은 감소하였고 대역폭은 넓어졌다. 분석한 모든 특성으로 닥 때 λ/2 모드가 λ/4 모드보다 다소 우수하였다.

Keywords

References

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