Deformation analysis of the surface micromachined MEMS structures due to the plasma ashing process

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플라즈마 애싱 공정에 의한 표면미세가공 MEMS 구조물의 변형 분석

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Low-thermal-budget and selective relaxation of stress gradients in gold micro-cantilever beams using ion implantation vol.15, pp.12, 2005, https://doi.org/10.1088/0960-1317/15/12/032