Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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The Diaphragm Structure Using the Local Surface Etching for the Improvement of Sensitivity Characteristics

감도특성 향상을 위한 국부적 표면식각 다이아프램 구조 연구

  • Published : 2004.07.31
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Abstract

In the pressure sensor, about below 20 kPa, the center boss diaphragm structure is generally used, but it is hard to obtain the high sensitivity because the center boss structure is limited at the thickness and size of diaphragm with chip size. Therefore, this paper suggests that the Center boss structure has surface etched diaphragm using a stress concentration to improve the sensitivity. We carried out the simulation and fabrication applied new diaphragm design. In the result, the sensitivity is improved to 60% without the change of non-linearity (0.14%FS). So, the Center boss of surface etched diaphragm can be applied for the high sensitivity in the low-pressure sensor.

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References

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