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Fabrication of Nano-precision PDMS Replica Using Two-photon Photopolymerization and Vacuum Pressure Difference Technique

  • Park, Sang-Hu (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Lim, Tae-Woo (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Yang, Dong-Yol (Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology) ;
  • Kong, Hong-Jin (Department of Physics, Korea Advanced Institute of Science and Technology) ;
  • Kim, Ran-Hee (Department of Polymer Science and Engineering, Hannam University) ;
  • Kim, Kyoung-Soo (Department of Polymer Science and Engineering, Hannam University) ;
  • Lee, Kwang-Sup (Department of Polymer Science and Engineering, Hannam University)
  • Published : 2004.08.20

Abstract

Keywords

References

  1. Maruo, S.; Kawata, S. J. Micro Electro Mechanical Systems 1998, 7, 411.
  2. Kawata, S.; Sun, H.-B.; Tanaka, T.; Takada, T. Nature 2001, 412, 667.
  3. Sun, H.-B.; Takada, T.; Kim, M.-S.; Lee, K.-S.; Kawata, S. Appl. Phys. Lett. 2003, 83, 1104. https://doi.org/10.1063/1.1599968
  4. Dieck, H. A.; Heck, R. F. J. Am. Chem. Soc. 1974, 96, 1133. https://doi.org/10.1021/ja00811a029
  5. Yi, S. W.; Lee, S. K.; Kong, H. J.; Yang, D.-Y.; Park, S.; Lime, T.; Kim, R. H.; Lee, K.-S. unpublished results.

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