International Journal of Precision Engineering and Manufacturing

Korean Society for Precision Engineering (한국정밀공학회)
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Effect of Film Thickness on the Tribological Characteristics of Zdol Lubricant on Silicon Surface

  • Kim, Yong-Sik (Department of Mechanical Engineering, Graduate School, Yonsei University) ;
  • Yang, Ji-Chul (Samsung Electronics, Yongin-City,) ;
  • Kim, Dae-Eun (School of Mechanical Engineering, Yonsei University)
  • Published : 2004.01.01
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Abstract

In precision mechanical components that experience sliding, it is important to reduce the friction to minimize surface damage. Particularly, new lubrication methods are needed to reduce friction in silicon based micro-systems applications. In this work, the tribological characteristics of PFPE (Perfluoropolyether) Zdol lubricant on silicon were investigated based on the thickness of the film. The lubricant was coated on silicon wafer specimens by the dip coating method. It was shown that the friction coefficient as well as stiction decreased as the thickness of the film increased. The results of this work may be applied to improve the tribological performance of silicon based micro-system components.

Keywords

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