Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

High Precision Measurement of Rotational Accuracy

회전정밀도의 고정밀 측정기술

  • ;
  • 박천홍 (한국기계연구원 공작기계그룹)
  • Published : 2004.08.01
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Abstract

초정밀 공작기계의 기능은 초정밀 운동에 의해 대부분 지배된다. 이러한 운동을 생성하는 고정밀 베어링의 운동정밀도는 이미 나노미터 레벨에 도달하고 있으며, 이러한 운동정밀도를 나노미터 레벨의 정밀도로 측정하는 것(정밀나노계측)이 중요한 과제가 되고 있다. 예를 들어, 초정밀선반 등에 있어서, 공기베어링을 대표로 하는 높은 회전정밀도를 갖는 회전축(주축)이 사용되고 있으며, 따라서 이러한 고정밀 주축의 회전정밀도를 나노미터 레벨의 정밀도로 평가하는 기술은 매우 중요하다. (중략)

Keywords

References

  1. Gao Wei, 'Precision Nanometrology and its Applications to Precision Nanosystems,' Proc. of NANO2003, Daejeon, pp. 115-122, 2003
  2. Tanaka, K., 'Air Bearing and Ultra Precision Machining,' Science of Machine, Vol. 34, No. 12, pp. 1304-1310, 1982
  3. Ohmori, Y., 'Roundness and cylindricity measuring machine RA-H5000,' High Tech Information, Chugoku Technology Promotion Center No. 124, pp. 7-22, 2000
  4. Kiyono, S., Gao, W. and Ogura, I., 'In Situ Self- Calibration of an Individual Displacement Sensor,' Jr. of JSPE, Vol. 63, No. 10, pp. 1417-1421, 1997
  5. Gao Wei, 'Error Seperation Methods for Spindle Error Measurement with Nanometer Accuracy,' Jr. of JSPE, Vol. 67, No. 7, pp. 1067-1071, 2001
  6. Sawabe, M., 'Methods for accuracy measurement of precision spindles and their problems,' Jr. of JSPE, Vol. 45, No. 10, pp. 1237-1242, 1979
  7. Ebihara, K. and Yamamoto, A., 'On the measurement of straightness of slide ways of machine beds,' Jr. of JSPE, Vol. 7, No. 27, pp. 133-137, 1941
  8. Donaldson, R. R., 'A simple method for separating spindle error from test ball roundness error,' Annals of the CIRP, Vol. 21, No. 1, pp. 125-126, 1972
  9. Estler, W. T., Evans, C. J. and Shao, L. Z., 'Uncertainty estimation for multiposition form error metrology,' Precision Engineering, Vol. 21, No. 2/3, pp. 72-82 https://doi.org/10.1016/S0141-6359(97)00058-5
  10. Kamigaki, I., Yamakawa, O., Omori, Y., Yamagiwa, T. and Sakai, H., 'Roundness measurement and its uncertainty in an international comparison,' Proc. of IMEKO 2000, Wien, pp. 139-144, 2000
  11. Horikawa, O., Sato, K. and Shimokohbe, A., 'Roundness and absolute radial motion accuracy measurement by an improved reversal method,' Jr. of JSPE, Vol. 57, No. 12, pp. 2231-2236, 1991
  12. Aoki, Y. and Ozono, S., 'On a new method of roundness measurement based on the three-point method,' Jr. of JSPE, Vol. 32, No. 12, pp. 831-836
  13. Mitsui, K., 'Spindle error measurement by the three-point method,' Jr. of JSPE, Vol. 48, No. 425, pp. 115-123
  14. Shinno, H., Mitsui K., Tanaka, N., Omino, T. and Tabata, T., 'A new method for evaluating error motion of ultra precision spindle,' Annals of CIRP, Vol. 36, No. 1, pp. 381-384, 1987 https://doi.org/10.1016/S0007-8506(07)62627-4
  15. Qi, X., Shimizu, S. and Imai, N., 'Measuring Method of Thermal Displacement for Machine Tools at High Speed Spindle Rotation,' Jr. of JSPE, Vol. 65, No. 3, pp. 396-400 https://doi.org/10.2493/jjspe.65.396
  16. Gao, W. and Kiyono, S., 'On-machine roundness measurement of cylindrical workpieces by the combined three-point method,' Measurement, vol. 21, No. 4, pp. 147-156 https://doi.org/10.1016/S0263-2241(97)00060-2
  17. Goho, K., Katurada, K. and Mitsui, K., 'On an analysis algorithm of the three-point method,' Proc. of JSPE Autumn Meeting, pp. 458, 1999
  18. Hara, S., 'The development of ultra precision rotate spindle,' Fujikoshi Engineering Review, Vol. 50, No. 2, pp. 50-56, 1994
  19. Cui, X., Takenouchi, T., Horiuchi, O., Ikeno, J. and Takasu, S., 'Combination of Air Spindle with Permanent Magnetic Bearing for Improved Rotational Accuracy and Stiffness,' Jr. of JSPE, Vol. 65, No. 4, pp. 615-619, 1999 https://doi.org/10.2493/jjspe.65.615
  20. Gao, W., Nomura, T. and Kiyono, S., 'Roundness Meaurement with Software Datum Method,' Jr. of JSPE, Vol. 60, No. 1, pp. 106-110, 1994
  21. Zhang, G. X. and Wang, R. K., 'Four-point method of roundness and spindle error easurements,' Annals of the CIRP, Vol. 42, No. 1, pp. 593-596, 1993 https://doi.org/10.1016/S0007-8506(07)62517-7
  22. Gao, W.,Kiyono, S. and Sugawara, T., 'High accuracy roundness measurement by a new error separation method,' Precision Engineering, Vol. 21, No. 2/3, pp. 123-133, 1997 https://doi.org/10.1016/S0141-6359(97)00081-0
  23. Gao, W., Kiyono, S. and Nomura, T., 'A new multiprobe method of roundness measurements,' Precision Engineering, Vol. 19, No. 1, pp. 37-45, 1996 https://doi.org/10.1016/0141-6359(96)00006-2
  24. Ogura, I., 'Rotational error analysis of turning surface by using software datum,' Process Control and Inspection for Industry;Proc. of SPIE Vol. 4222, pp. 404-407, 2000 https://doi.org/10.1117/12.403854
  25. Sawabe, M. 'Methods for accuracy measurement of precision spindles and their problems,' Journal of JSPE, 45-10,(1979), pp. 1237-1242