Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Nano-scale Precision Polishing Characteristics using a Micro Quill and Magnetic Chain Structure

미세공구와 자기체인구조를 이용한 초정밀 폴리싱 특성

  • 박성준 (연세대학교 나노과학기술연구단) ;
  • 안병운 (서울산업대학교 대학원 기계공학) ;
  • 이상조 (연세대학교 기계공학부)
  • Published : 2004.08.01
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Abstract

A new polishing technique for three dimensional micro/meso-scale parts is suggested using a micro quill and a magnetic chain structure. The principle of this method is to polish the target surface with the collected magnetic brushes at a micro tool by the non-uniform magnetic field generated around the tool. In a typical magnetic abrasive finishing process magnetic particles and abrasive particles are unbonded each other. But, to finish the three dimensional small parts bonded magnetic abrasive have to be used. Bonded magnetic abrasives are made from direct bonding, and their polishing characteristics are also examined. Alumina, silicon carbide and diamond micro powders are used as abrasives. Base metal matrix is carbonyl iron powder. It is found that bonded magnetic abrasives are superior to unbonded one by experiment. finally, the polished surface roughness is evaluated by atomic force microscope.

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References

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