Korean Journal of Air-Conditioning and Refrigeration Engineering (설비공학논문집)

The Society of Air-Conditioning and Refrigerating Engineers of Korea (대한설비공학회)
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Evaluation of a Propulsion Force Coefficients for Transportation of Wafers in an Air Levitation System

공기부상방식 반도체 웨이퍼 이송시스템의 추진력계수

  • 문인호 (㈜신성이엔지 기술연구소) ;
  • 황영규 (성균관대학교 기계공학부)
  • Published : 2004.09.01
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Abstract

The propulsion force acting on a wafer in an air levitation system was measured accurately and then, the corresponding force coefficient was determined. The theoretical propulsion force on the wafer bottom surface were obtained by CFD simulations and from these results the propulsion force coefficient was deduced. The transportation velocity of a wafer was estimated by using both experimental and numerical force coefficients, for various air velocity of nozzle injection. When the numerical results are compared to the experimental data, the numerical results agree well Quantitatively.

Keywords

References

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