Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Development of an Assembly-free Process for Micro-stereolithography Technology

마이크로 광 조형기술에서의 통합성형공정의 개발

  • Published : 2004.09.01
Download PDF
⟨ Previous Next ⟩

Abstract

As it is difficult to construct a micro-fluidic system composed of micro-mixers, micro-channels and/or micro-chambers in a single process, an assembly process is typically used. The assembling and bonding of micro-parts, however, introduces other problems. In this work, a virtual assembly process was developed that can be used to design various micro-systems before actual fabrication commences. In the process, the information required for the micro-stereolithography process is generated automatically. Consequently, complex micro-fluidic systems can be fabricated in a single process, thereby avoiding the need fur additional assembly or bonding processes. Using the developed process, several examples were fabricated.

Keywords

References

  1. Ikuta, K., Hirowatari, K., 'Real three-dimensional micro fabrication using stereo lithography and metal molding,' Proceedings of the IEEE international Workshop on Micro Electro Mechanical Systems(MEMS'93), pp. 42-47, 1993 https://doi.org/10.1109/MEMSYS.1993.296949
  2. Ikuta, K., Maruo, S., Kojima, S., 'New micro stereo lithography for freely movable 3D micro structure,' Proceedings of the IEEE international Workshop on Micro Electro Mechanical Systems (MEMS'93), pp. 290-295, 1993 https://doi.org/10.1109/MEMSYS.1998.659770
  3. Ballandras, S., Calin, M., Zissi, S., Bertsch, A., Andre, J. C., Hauden, D., 'Microstereo-photolithography and shape memory alloy for the fabrication of miniaturized actuators,' Sensors and Actuators A: Physical, 62/1-3, pp. 741-747, 1997 https://doi.org/10.1016/S0924-4247(97)01574-4
  4. Bertsch, A., Lorenz, H., Renaud, P., '3D micro-fabrication by combining microstereolithography and thick resist UV lithography,' Sensors and Actuators A: Physical, 73/1-2, pp. 14-23, 1999 https://doi.org/10.1016/S0924-4247(98)00249-0
  5. Lee, I.H., Cho, D.-W., 'Micro-stereolithography photopolymer solidification patterns for various laser beam exposure conditions,' The International Journal of Advanced Manufacturing Technology, 22/5-6, PP. 410-416, 2003 https://doi.org/10.1007/s00170-003-1538-9
  6. Lee, I.H, Cho, Y.H, Cho, D.-W, Lee, E.S, 'Development of micro-stereolithography Systems for the fabrication of Three-dimensional micro-structures,' Journal of Korean Society of Precision Engineering, Vol. 21, No. 2, Feb. 2004
  7. Kim, D.S., Lee, I.H., Kwon, T.H., Cho, D.-W., 'A Novel Chaotic Micromixer:Barrier Embedded Kenics Micromixer,' Proceedings of Micro Total Analysis Systems 2003, 1, pp. 73-76, 2003