Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Microfabrication by Localized Electrochemical Deposition Using Ultra Short Pulses

초단펄스 응용 전해증착에 의한 마이크로 구조물 제작

  • 박정우 (서울대학교 대학원 기계항공공학부) ;
  • 류시형 (전북대학교 기계항공시스템공학부) ;
  • 주종남 (서울대학교 기계항공공학부)
  • Published : 2004.11.01
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Abstract

In this research, microfabrication technique using localized electrochemical deposition (LECD) with ultra short pulses is presented. Electric field is localized near the tool tip end region by applying a few hundreds of nano second pulses. Pt-Ir tip is used as a counter electrode and copper is deposited on the copper substrate in 0.5 M CuSO$_4$ and 0.5 M H$_2$SO$_4$ electrolyte. The effectiveness of this technique is verified by comparison with LECD using DC voltage. The deposition characteristics such as size, shape, surface, and structural density according to applied voltage and pulse duration are investigated. The proper condition is selected from the results of the experiments. Micro columns less than 10 $\mu$m in diameter are fabricated using this technique. The real 3D micro structures such as micro pattern and micro spring can be fabricated by this method. It is suggested that presented method can be used as an easy and inexpensive method for fabrication of microstructure with complex shape.

Keywords

References

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