Journal of the Korean Society for Nondestructive Testing (비파괴검사학회지)

The Korean Society for Nondestructive Testing (한국비파괴검사학회)
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The Study of Near-field Scanning Microwave Microscope for the Nondestructive Detection System

비파괴 측정을 위한 근접장 마이크로파 현미경 연구

  • Published : 2004.10.30
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Abstract

We described a near-field scanning microwave microscope which uses a high-quality dielectric resonator with a tunable screw. The operating frequency is f=4.5 5GHz. The probe tip is mounted in a cylindrical resonant cavity coupled to a dielectric resonator We developed a hybrid tip combining a reduced length of the tapered part with a small apex. In order to understand the function of the probe, we fabricated three different tips using a conventional chemical etching technique and observed three different NSMM images for patterened Cr films on glass substrates. We measured the reflection coefficient of different metal thin film samples with the same thickness of 300m and compared with theoretical impedance respectly. By tuning the tunable screw coming through the top cover, we could improve sensitivity, signal-to-noise ratio, and spatial resolution to better than $1{\mu}m$. To demonstrate the ability of local microwave characterization, the surface resistance of metallic thin films has been mapped.

근접장의 특성과 근접장 마이크로파 현미경의 배경이론을 설명하였고 유전체 공진기 제작에 앞서 HFSS (high frequency structure simulator)를 이용한 모의 시뮬레이션을 기술하였다. 이것을 바탕으로 원통형 유전체 공진기를 제작하여 금속탐침과 결합한 근접장 마이크로파 현미경(near field scanning microwave microscope : NSMM)을 구성하였다. 제작한 유전체 공진기의 특성은 HFSS를 이용하여 모의 실험한 결과와 비교하였다 Tip의 기하학적 모양에 따른 공간분해능과 감도(sensitivity)를 연구하였고 contrast가 가장 좋은 hybrid tip을 개발하였다. 전도도가 서로 다른 금속시료에 따른 NSMM의 반사계수의 변화를 측정하였고 실험결과와 이론적 시료의 임피던스를 비교하였다. 마지막으로 유전체 공진기를 이용한 NSMM으로 공간 분해능이 $1{\mu}m$의 Cr과 NiFe 패턴의 이미지를 비접촉, 비파괴방법으로 얻었다.

Keywords

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