Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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A Study on the Pd-Ni Alloy Hydrogen Membrane Using the Sputter Deposition

스퍼터 증착 방식으로 제조된 Pd-Ni 합금 수소 분리막 연구

  • 김동원 (경기대학교 신소재공학과) ;
  • 박정원 (경기대학교 신소재공학과) ;
  • 김상호 (한국기술교육대학교 신소재공학과) ;
  • 박종수 (한국에너지기술연구원)
  • Published : 2004.10.01
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Abstract

A palladium-nikel(Pd-Ni) alloy composite membrane has been fabricated on microporous nickel support formed with nickel powder. Plasma surface treatment process is introduced as pre-treatment process instead of HCI activation. Pd coating layer was prepared by dc magnetron sputtering deposition after $H_2$ plasma surface treatment. Palladium-nickel alloy composite layer had a fairly uniform and dense surface morphology. The membrane was characterized by permeation experiments with hydrogen and nitrogen gases at temperature of 773 K and pressure of 2.2psi. The hydrogen permeance was 6 ml/minㆍ$\textrm{cm}^2$ㆍatm and the selectivity was 120 for hydrogen/nitrogen($H_2$/$N_2$) mixing gases at 773 K.

Keywords

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