A Study on the Friction and Wear Characteristics of TiC, TiN and Ti(CN) with PECVD Process

PECVD 공정에 의한 TiC, TiN 및 Ti(CN)의 마찰 마모 특성 연구

  • 이봉구 (원광대학교 기계자동차공학부) ;
  • 전찬열 (중부대학교 메카트로닉스공학과) ;
  • 김정기 (전북기능대학 컴퓨터응용기계과) ;
  • 김동현 (원광대학교 기계자동차공학부) ;
  • 오성모 (중부대학교 메카트로닉스공학과)
  • Published : 2005.04.01

Abstract

In order to determine the wear Properties of PECVD ceramic coatings, wear process was evaluated using the coated pin of Falex Tribosystem. Coating materials deposited wear the TiC, TiN and Ti(CN). An experimental process was established to determine the tribological characteristics of friction and wear behavior under the variation of applied load, temperature and sliding distance by the Falex test machine. The experimental results indicate that TiN coating compared with TiC coating on e materials have e excellent friction and wear characteristics. However TiC coating compared i친 TiN coatings have a low friction coefficient with steel and good thermal stability, and Ti(CN) has the excellent anti-wear properly as well as the superiority of extreme pressure property. Compound coating compared wi simple coatings show improved tribological characteristics.

Keywords

References

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