Abstract
Novel structure ultrasonic motors which have cross type stator were designed and fabricated. Driving characteristics of the motors were analyzed and measured by changing the materials of the stator. This ultrasonic motor has stator with hollowed cross bar and the stator rotate the rotor using elliptical displacement of the inside tips. This motion is generated by lateral vibration mode of cross bars. This stator was analyzed by finite element analysis depandent on stator's materials. And the cross type ultrasonic motors were made by analyzed results. The larger displacements were obtained, when the density of material was decreased. But the stress was increased when the stator's material has large density and Young's modulus. The fabricated one has high speed and torque in large stress on contact point between rotor and stator. The stress was more effected on speed and torque than the displacement.
