Journal of Magnetics

The Korean Magnetics Society (한국자기학회)
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RF Integrated Electromagnetic-Noise Filters Incorporated with Nano-granular Co41Fe38AI13O8 Soft Magnetic Thin Films on Coplanar Transmission Line

  • Sohn, Jae-Cheon (Future Technology Division, Korea Institute of Science and Technology) ;
  • Yamaguchi Masahiro (ECEI Department, Tohoku University) ;
  • Lim, Sang-Ho (Department of Materials Science and Engineering, Korea University) ;
  • Han, Suk-Hee (Future Technology Division, Korea Institute of Science and Technology)
  • Published : 2005.12.01
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Abstract

The RF integrated noise filters are fabricated by photolithography. The stack for the electromagnetic noise filters consists of the nano-granular ($Co_{41}Fe_{38}AI_{13}O_8$) soft magnetic film / $SiO_2$ / Cu transmission line / seed layer (Cu/Ti) / $SiO_2$-substrate. A good signal-attenuation feature along with a low signal-reflection feature is observed in the present filters. Especially in the noise filter incorporated with a $Co_{41}Fe_{38}AI_{13}O_8$ magnetic film with lateral dimensions of $2000{\mu}m$ wide, 15 mm long and $1{\mu}m$ thick, the maximum magnitude of signal attenuation reaches -55 dB, and the magnitude of signal reflection is below -10 dB in the overall frequency range. And this level of signal attenuation is much larger than that of a noise filter incorporated with a Fe magnetic film.

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References

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