Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Adaptive Force Ripple Compensation and Precision Tracking Control of High Precision Linear Motor System

초정밀 선형 모터 시스템의 적응형 힘리플 보상과 정밀 트랙킹 제어

  • 최영만 (한국과학기술원 기계공학과) ;
  • 권대갑 (한국과학기술원 기계공학과) ;
  • 이문구 (삼성전자 메카트로닉스 연구소)
  • Published : 2005.12.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper describes a robust control scheme for high-speed and long stroke scanning motion of high precision linear motor system consisting of linear motor, air bearing guide and position measurement system using heterodyne interferometer. Nowadays, semiconductor process and inspection of wafer or LCD need high speed and long travel length for their high throughput and extremely small velocity fluctuations or tracking errors. In order to satisfy these conditions, linear motor system are widely used because they have large thrust force and do not need motion conversion mechanisms such as ball screw, rack & pinion or capstan with which the system are burdened. However linear motors have a problem called force ripple. Force ripple deteriorates the tracking performances and makes periodic position errors. So, force ripple must be compensated. To maximize the tracking performance of linear motor system, we propose the control scheme which is composed of a robust control method, Time Delay Controller (TDC) and a feedforward control method, Zero Phase Error Tracking Control (ZPETC) for accurate tracking a given trajectory and an adaptive force ripple compensation (AFC) algorithm fur estimating and compensating force ripple. The adaptive ripple compensation is continuously refined on the basis of tracking error. Computer simulation results based on modeled parameters verify the effectiveness of the proposed control scheme for high-speed, long stroke and high precision scanning motion and show that the proposed control scheme can achieve a sup error tracking performance in comparison to conventional TDC control.

Keywords

References

  1. Lee, M. G., 'Design and actuation of precision linear positioning system with multi-segmented trapezoidal magnet array.' Doctoral Thesis, KAIST, 2003
  2. Hung, J. Y. and Ding, Z., 'Design of currents to reduce torque ripple in brushless permanent magnet motors,' lEE Proceedings-B, Vol.140, No.4, July, 1993 https://doi.org/10.1049/ip-b.1993.0032
  3. Matsui, N., Makino, T. and Satoh, H., 'Auto compensation of Torque Ripple of Direct Drive Motor by Torque Observer,' IEEE Transactions on Industry Applications, Vol. 29, No. 1, pp. 187-194, Jan./Feb. 1993 https://doi.org/10.1109/28.195906
  4. Jang, H., 'The Compensation of torque ripple of brushless DC motor using feedforward method,' Master Thesis KAIST, 1997
  5. Tan, K. K., Huang, S. N. and Lee, T. H., 'Robust adaptive numerical compensation for friction and force ripple in permanent-magnet linear motors,' IEEE Transactions on Magnetics, Vol. 38, No. 1, pp. 221­-228, Jan. 2002 https://doi.org/10.1109/20.990111
  6. Braembussche, P. V., Swevers, J., Brussel, H. V. and Vanherch, P., 'Accurate tracking control of linear synchronous motor machine tool axes,' Mechatronics, Vol. 6, No. 5, pp. 507-521, 1996 https://doi.org/10.1016/0957-4158(95)00090-9
  7. Yao, Bin and Xu, Li, 'Adaptive Robust Motion Control of Linear Motors for Precision Manufacturing,' Mechatronics, Rergamon, Vol. 12, pp. 595-616, 2002 https://doi.org/10.1016/S0957-4158(01)00008-3
  8. Otten, G., Vries, T., Amerongen, J., Rankers, A. and Gaal, E. W., 'Linear Motor Motion Control Using a Learning Feedforward Controller,' IEEE/ASME transactions on mechatronics, Vol. 2, No.3, Sep. 1997 https://doi.org/10.1109/3516.622970
  9. Alter, D. M. and Tsao, T. C., 'Control of linear motors for machine tool feed drives : Design and implementation of $H^{\infty}$ optimal feedback control,' ASME J. Dyn. Syst.,Meas., Contr., Vol. 118, pp. 649-658,1996 https://doi.org/10.1115/1.2802339
  10. Park, H. S., 'A study on the simultaneous design of continuous ZPETC and TDC for trajectory control of A nonminimum phase,' Master's Thesis, KAIST, 1996
  11. Hsia, T. C. and Gao, L. S., 1990, 'Robot Manipulator Control Using Decentralized Linear Time-Invariant Time-Delayed Joint Controllers,' IEEE Int. Conference on Robotics and Automations, pp. 2070-2075 https://doi.org/10.1109/ROBOT.1990.126310
  12. Youcef-Toumi, K. and Ito, Osamu, 'A time delay controller for systems with unknown dynamics,' Trans. of ASME, J. Dyn. Sys., Meas., Contr., Vol. 112, No. I, pp. 133-142, 1990 https://doi.org/10.1115/1.2894130
  13. Tomizuka, Masayoshi, 'Zero Phase Error Tracking Algorithm for Digital Control,' ASME J. Dyn. Syst., Meas., Contr., Vol. 109, pp. 65-68, March 1987 https://doi.org/10.1115/1.3143822
  14. Astrome, K., Hagander, P. and Stemby, J., 'Zeros of Sampled systems,' Automatica, Vol. 20, No.1, pp. 200-210, 1984 https://doi.org/10.1016/0005-1098(84)90062-1
  15. Lee S. Q., 'Design and continuous gain scheduling control of high precision XY-Theta stage,' Doctoral Thesis, KAIST, 2001
  16. Franklin, G. F., Powell, J. D. and Workman, M., 'Digital Control of Dynamic Systems,' 3rd ed., Addison Wesley Longman, 1998