Effects of RF Power and $O_2$/Ar Flow Ratio on the Properties of AZO Thin Films for Transparent Electrodes Deposited by RF Magnetron Sputtering

RF 전력과 산소 유량비에 따른 투명전극용 AZO박막의 특성 비교

Lee, Jong-Mu;Yim, Keun-Bin
이종무;임근빈

  • Published : 2005.12.22

Abstract

Keywords

References

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