Experimental Study on Wet Thermal and PECVD Oxides for GOI Fabrication

GOI 제작을 위한 습식 산화막과 PECVD 산화막에 대한 실험적 고찰

Byun, Young-Tae;Jhon, Young-Min;Kim, Sun-Ho
변영태;전영민;김선호

  • Published : 20050900

Abstract

Keywords

References

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