Experimental Study on Direct Bonding of GaAs and Si wafers for GOI Fabrication

GOI 제작을 위한 GaAs와 Si 웨이퍼의 직접 접합에 대한 실험적 고찰

Park, Jong-Kook;Byun, Young-Tae;Park, Jin-Woo
박종국;변영태;박진우

  • Published : 20051000

Abstract

Keywords

References

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