Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
권호 표지

Studies on the Development of TiAIN/CrN Multi-layered Thin Films by Unbalanced Magnetron Sputtering Process

비대칭 스퍼터링에 의한 TiAIN/CrN 나노 다층 박막의 합성 및 특성 분석에 관한 연구

  • Kim, Gwang-Seok (Center for Advanced Plasma Surface Technology Materials Engineering Department, Hankuk Aviation University) ;
  • Kim, Bom-Sok (Center for Advanced Plasma Surface Technology Materials Engineering Department, Hankuk Aviation University) ;
  • Lee, Sang-Yul (Center for Advanced Plasma Surface Technology Materials Engineering Department, Hankuk Aviation University)
  • 김광석 (한국항공대학교 항공재료공학과) ;
  • 김범석 (한국항공대학교 항공재료공학과) ;
  • 이상율 (한국항공대학교 항공재료공학과)
  • Published : 2005.12.01
Download PDF
⟨ Previous Next ⟩

Abstract

In this work a multi-layered nanostructured TiAIN/CrN superlattice coatings was synthesized using closed-field unbalanced magnetron sputtering method and the relationships between their superlattice period (1), micro-structure, hardness and elastic modulus were investigated. In addition, wear test at $500^{\circ}C$ and oxidation resistance test at $900^{\circ}C$ were performed to investigate high temperature properties of these thin films. The coatings were characterized in terms of microstructure and mechanical properties by transmission electron microscopy (TEM) and nano-indentation test. Results from TEM analysis showed that superlattice periods was inversely proportional to the jig rotation speed. The maximum hardness and elastic modulus of 37 GPa and 375 GPa were observed at superalttice period of 6.1 nm and 4.4 nm, respectively. An higher value of microhardness from TiAIN/CrN thin films than either TiAIN (30 GPa) or CrN (26 GPa) was noted while the elastic modulus was approximately an average of TiAIN and CrN films. These enhancement effects in superlattice films could be attributed to the resistance to dislocation glide across interface between the CrN and TiAIN layers. Much improved plastic deformation resistance ($H^3/E^2$) of 0.36 from TiAIN/CrN coatings was observed, compared with 0.15 and 0.16 from TiAIN and CrN, respectively. Also the wear resistance at $500^{\circ}C$ was largely increased than those of single TiAIN and CrN coatings and TiAIN/CrN coatings showed much reduced weight gain after exposure at $900^{\circ}C$ for 20 hours.

Keywords

References

  1. S. Veprek, M. Jilek, Vacuum, 67 (2002) 443-449 https://doi.org/10.1016/S0042-207X(02)00229-4
  2. J. Musil, Surf. & Coat. Technol., 125 (2000) 322-330 https://doi.org/10.1016/S0257-8972(99)00586-1
  3. P. Holubar, M. Jilek, M. Sima, Surf. & Coat. Technol., 133-134 (2000) 145-151 https://doi.org/10.1016/S0257-8972(00)00956-7
  4. W. D. Sproul, Surf. & Coat. Technol., 86-87 (1996) 170-176 https://doi.org/10.1016/S0257-8972(96)02977-5
  5. Philip C. Yashar, William D. Sproul, Vacuum, 55 (1999) 179 https://doi.org/10.1016/S0042-207X(99)00148-7
  6. J. Musil, P. Karankova, J. Kasl, Surf. & Coat. Technol., 139 (2001) 101 https://doi.org/10.1016/S0257-8972(01)00989-6
  7. A. A. Voevodin, J. P. O'Neill, J. S. Zabinski, Surf. & Coat. Technol., 116-119 (1999) 36 https://doi.org/10.1016/S0257-8972(99)00228-5
  8. S. Veprek, A. Niederhofer, K. Moto, et al., Surf. & Coat. Technol., 133-134 (2000) 152 https://doi.org/10.1016/S0257-8972(00)00957-9
  9. G. W. Kim, S. Y. Lee, J. H. Hahn, Surf. & Coat. Technol., 193 (2005) 213 https://doi.org/10.1016/j.surfcoat.2004.07.021
  10. K. L. Johnson, Contact Mechanics, Cambridge University Press, London, UK, 1985 : ISBN 0-521-34796-3
  11. C. W. Kim, K. H. Kim, Thin Solids Films, 307 (1997) 113 https://doi.org/10.1016/S0040-6090(97)00212-5
  12. W. D. Munz, J. Vac. Sci Tech A 4(6) (1986) 2717 https://doi.org/10.1116/1.573713