Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Development of QCM dew point sensor and its sensing characteristics study

수정미소저울 노점센서 제작 및 반응특성 연구

  • Kwon, Su-Yong (Temperature-Optics Metrology Group, Division of Physical Metrology, Korea Research Institute of Standards and Science) ;
  • Kim, Jong-Chul (Temperature-Optics Metrology Group, Division of Physical Metrology, Korea Research Institute of Standards and Science) ;
  • Choi, Byung-Il (Temperature-Optics Metrology Group, Division of Physical Metrology, Korea Research Institute of Standards and Science)
  • 권수용 (한국표준과학연구원 기반표준부 온도/광도그룹) ;
  • 김종철 (한국표준과학연구원 기반표준부 온도/광도그룹) ;
  • 최병일 (한국표준과학연구원 기반표준부 온도/광도그룹)
  • Published : 2006.07.30
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Abstract

This paper represents development of quartz crystal microbalance (QCM) and usage as a dew point sensor. The temperature of a quartz resonator was controlled precisely from $20^{\circ}C$ to $-30^{\circ}C$ with the ramping rate of $0.1^{\circ}C/s$ by using a custom-made crystal holder housing the quartz resonator associated with a thermoelectric cooler (Peltier cooler), which results in the working range from $15.2^{\circ}C$ to $-24.0^{\circ}C$ based on an accurate holder temperature compensation and temperature effect compensation process. The developed QCM dew point sensor and analysis techniques show very good sensing characteristics at measurement of moist air with the relative humidity from 10 %R.H. to 90 %R.H. generated by a divided-type humidity generator and the dew point temperatures were determined with an accuracy of less than ${\pm}0.18^{\circ}C$, which also showed good agreement with reference values in their error range.

Keywords

References

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