Korean Journal of Air-Conditioning and Refrigeration Engineering (설비공학논문집)

The Society of Air-Conditioning and Refrigerating Engineers of Korea (대한설비공학회)
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Characteristics of Particle Deposition onto the Cleanroom Wall Panel with Electrostatic Voltages

정전압에 따른 클린룸 벽체에서의 입자침착 특성

  • Noh, Kwang-Chul (Department of Mechanical and Information Engineering University of Seoul) ;
  • Son, Young-Tae (MCC TG of Manufacturing Engineering R&D Institute, Samsung Electro-Mechanics Co., Ltd.) ;
  • Kim, Jong-Jun (Department of Mechanical and Information Engineering University of Seoul) ;
  • Oh, Myung-Do (Department of Mechanical and Information Engineering University of Seoul)
  • 노광철 (서울시립대학교 기계정보공학과) ;
  • 손영태 (삼성전기 생산기술연구소 MCC TG) ;
  • 김종준 (서울시립대학교 기계정보공학과) ;
  • 오명도 (서울시립대학교 기계정보공학과)
  • Published : 2006.12.10
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Abstract

We carried out the experiments on particle deposition onto the cleanroom wall panels. And then we investigated the particle deposition characteristic coefficients for electrostatic voltages and particle size. It was found that there is little difference in characteristics of the particle deposition between the steel panel and the anti-static coating panel. In case of that the particle size is under $1.0{\mu}m$, the particle deposition characteristic coefficient becomes larger as the electrostatic voltage induced to the cleanroom wall panel is increasing. Where in case of that the particle size is over $3.0{\mu}m$, the particle deposition characteristic coefficients do not show any differences with the electrostatic voltages. It is due to that the electrostatic force is the major particle transport mechanism for submicron particles, while the gravitational settling is the major particle transport mechanism for overmicron particles when the electro-static voltages are induced to the cleanroom wall panel.

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References

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