Electric Device Character and fabrication of advanced thin film including nano particles

나노입자가 내장된 기능성 박막의 제작과 전자소자 특성

  • 류정탁 (대구대학교 전자공학부) ;
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  • Published : 2006.12.30

Abstract

Carbon nanofibers have synthesized a low temperature using DC Ar plasma and Fe-Phthalocyanine, and a characteristic difference of the synthesized CNF according to the location of the substrate was investigated. The carbon nanofibers had about 100nm diameter and up to $10{\mu}m$ length. These were grown in random orientation. There are two shapes in the CNFs, screw and straight line shapes. Furthermore, we found the selective growth of nanofibers on the scratched substrates. The density of CNFs synthesized on the position (a) were higher than that synthesized on the position (b) [See the Fig. 2]. Also, the length of CNFs was different. In the shape, CNFs with screw and straight line shape were synthesized in the position (a), but. only CNFs with straight line shape were synthesized in the position (b). The difference have an important effect on the field emission characteristics.

본 논문에서는 DC 플라즈마와 금속유기물을 사용하여 CNF의 저온 합성에 성공하였다. 합성된 CNTs는 기판의 위치에 따라 매우 다른 특성 차이가 보였다. CNT는 일반적으로 직경 100 nm, 길이 $10{\mu}m$의 특성을 가진다. CNT의 형태적 특성들은 전계전자방출특성에 큰 영향을 준다는 사실을 본 연구를 통해 알 수 있었다. 따라서 CNF의 합성에 의한 CNF 구조적 특성은 전자소자응용면에서 매우 중요한 역할을 한다.

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