Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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A Study on the Motion Mechanism of Multi-Axis Ultra Precision Stage for Optical Element Alignment

광소자 정렬용 극초정밀 다축 스테이지의 구동 메커니즘에 관한 연구

  • Published : 2006.02.01
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Abstract

The communication through optical fiber is taking an important role of the expansion of communication network with excellent transmitting rate and quality. As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement of the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

Keywords

References

  1. Kim, J. D., 2000, Technology of optical communication devices, KISTI S & T Information Analysis
  2. Shin, B. S., Kim, J. G., Chang, W. S., Yang, S. B., Kim, J. M. and Jeon, B. H., 2002, 'Development of Direct Writing Technology using UV Laser,' Development of Micro Optical and Thermofluidic Device Technical Functionality Workshop, pp. 1-5
  3. Chung, Y., Jeong, J. and Chung, L., 1994, 'Aging -induced wavelength shifts in 1.5-m DFB lasers,' IEEE Photon. Technol. Lett., Vol. 6, pp. 792-795 https://doi.org/10.1109/68.311456
  4. Vodhanel, M., Wagner, R. E. and Sessa, W. B., 1994, 'Long-term wavelength drift of the order of 0.01nm/yr for 15 free-running DFB laser modules,' OFC94
  5. Chung, Y., Clark, L. and Fan, C., 1995, 'Standardization of Optical Frequencies for WDM Networking Applications,' Proc. SPIE, Vol. 2378, pp. 230-235, Feb
  6. Jeong, S. H., 2002, 'A Study on the Development and Compensation of Precision Multi-Axis Positioning System,' Proc. of KSPE, pp. 455-458, October
  7. Kim, J. Y., Lee, B. R., Yang, S. Y. and Ahn, K. K., 2003, 'Precision Position Control of Piezoactuator using Inverse Hysteresis Model and Neuro-PID Controller,' Journal of Control, Automation and System Engineering, Vol. 9, No. 1, pp. 22-29 https://doi.org/10.5302/J.ICROS.2003.9.1.022
  8. Moritex, 2003, Automated Optical Alignment/Focal Brochure
  9. AEROTECH, 2003, Automation Solutions for the Fiberoptics Industry