Abstract

Ultra precision positioning mechanism has been widely used on semiconductor manufacturing equipments, optical spectrum analyzers and cell manipulations. Ultra precision positioning mechanism consists of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design and analyze the micro stage that is one of the equipments embodied in ultra precision positioning mechanism. The micro stage consists of PZT actuators and flexure hinges. The structural design of flexure hinge is optimized by using RSM and FEM. The control factors concerned with the design of flexure hinges of stage and arms are optimized by minimizing the equivalent stress on the hinge and maximizing 1st natural frequency based on RSM and FEM simulation under various kinds of design conditions.

Keywords

• Micro Stage;
• PZT;
• RSM;
• FEM;
• Flexure Hinge

• 마이크로 스테이지;
• 압전소자;
• 반응표면분석법;
• 유한요소법;
• 유연힌지;