JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
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Schottky Barrier MOSFETs with High Current Drivability for Nano-regime Applications

  • Jang, Moon-Gyu (Nano-Bio-Electronic Devices Team, IT Convergence Technology Research Division, Electronics and Telecommunications Research Institute) ;
  • Kim, Yark-Yeon (Nano-Bio-Electronic Devices Team, IT Convergence Technology Research Division, Electronics and Telecommunications Research Institute) ;
  • Jun, Myung-Sim (Nano-Bio-Electronic Devices Team, IT Convergence Technology Research Division, Electronics and Telecommunications Research Institute) ;
  • Choi, Chel-Jong (Nano-Bio-Electronic Devices Team, IT Convergence Technology Research Division, Electronics and Telecommunications Research Institute) ;
  • Kim, Tae-Youb (Nano-Bio-Electronic Devices Team, IT Convergence Technology Research Division, Electronics and Telecommunications Research Institute) ;
  • Park, Byoung-Chul (Department of Nano-science & Technology, Chungnam National University) ;
  • Lee, Seong-Jae (Nano-Bio-Electronic Devices Team, IT Convergence Technology Research Division, Electronics and Telecommunications Research Institute)
  • Published : 2006.03.31
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Abstract

Various sizes of erbium/platinum silicided n/p-type Schottky barrier metal-oxide-semiconductor field effect transistors (SB-MOSFETs) are manufactured from $20{\mu}m$ to 10nm. The manufactured SB-MOSFETs show excellent DIBL and subthreshold swing characteristics due to the existence of Schottky barrier between source and channel. It is found that the minimization of trap density between silicide and silicon interface and the reduction of the underlap resistance are the key factors for the improvement of short channel characteristics. The manufactured 10 nm n-type SBMOSFET showed $550{\mu}A/um$ saturation current at $V_{GS}-V_T$ = $V_{DS}$ = 2V condition ($T_{ox}$ = 5nm) with excellent short channel characteristics, which is the highest current level compared with reported data.

Keywords

References

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