Transactions of the Korean Society of Machine Tool Engineers (한국공작기계학회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Characteristic of Ductile Regime AFM Machining Using Acoustic Emission

AE를 이용한 AFM 연성 영역 가공 특성 연구

  • 안병운 (한양대학교 대학원 메카트로닉스.시스템과) ;
  • 이광호 (한양대학교 대학원 메카트로닉스.시스템과) ;
  • 이성환 (한양대학교 기계공학과)
  • Published : 2006.08.01
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Abstract

Recently, atomic force microscope(AFM) with suitable tips is being used for nano fabrication/nanometric machining purposes. In this paper, acoustic emission(AE) was introduced to monitor the nanometric machining of brittle materials(silicon) using AFM. In the experiments, AE responses were sampled, as the tip load was linearly increased(ramped load), to investigate the machining characteristics during a continuous movement. By analyzing the experimental results, it can be concluded that measured AE energy is sensitive to changes in the mechanism of material removal including the ductile-brittle transition during the nanometric machining. The critical depth of cut value for the transition is evaluated and discussed.

Keywords

References

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