Journal of the Optical Society of Korea

Optical Society of Korea (한국광학회)
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Bare Wafer Inspection using a Knife-edge Test

  • Received : 2007.08.31
  • Published : 2007.12.25
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Abstract

We present a very simple and efficient bare-wafer inspection method using a knife-edge test. The wafer front surface and inner structures are inspected simultaneously. The wafer front surface is inspected visually using a knife-edge test while the inner structure is simultaneously inspected by a camera in the infrared region with a single white-light source. This paper presents a laboratory implementation of the test method with some experimental results.

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References

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