Journal of Fisheries and Marine Sciences Education (수산해양교육연구)

The Korean Society for Fisheries and Marine Sciences Education (한국수산해양교육학회)
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A Study on the microcooling Fin Fabrication Process for Enhancing Boiling Heat Transfer

비등열전달 향상을 위한 초소형 핀 제작공정에 관한 연구

  • Received : 2007.06.05
  • Accepted : 2007.12.05
  • Published : 2007.12.31
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Abstract

This paper presents the fabrication techniques of microcooling fins for microelectronics applications. The various types of cooling fins have been fabricated on the surface of a silicon wafer (4inch-N type) by using wet etching technique. The designed micro fins and micro channels are considered as an effective method for cooling microelectronics devices generating high heat flux. Further we extensively investigate the design processes fabricating micro fins and channels which can cool the heat generated from high density electronics devices.

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References

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