Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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Method of Particle Contamination Control for Yield Enhancement in the Cleanroom

클린룸 제조공정에서 수율개선을 위한 입자오염제어 방법

  • 노광철 (서울시립대학교 산업기술연구소) ;
  • 이현철 (삼성전기 생산기술연구소 MCC TG) ;
  • 김대영 (삼성전기 생산기술연구소 MCC TG) ;
  • 오명도 (서울시립대학교 기계정보공학과)
  • Published : 2007.06.01
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Abstract

The practical studies on the method of particle contamination control for yield enhancement in the cleanroom were carried out. The method of the contamination control was proposed, which are composed of data collection, data analysis, improvement action, verification, and implement control. The partition check method and the composition analysis for data collection and data analysis were respectively used in the main board and the cellular phone module production lines. And these methods were evaluated by the variation of yield loss between before and after improvement action. In case that the partition check method was applied, the critical process step was selected and yield loss reduction through improvement actions was observed. While in case that the composition analysis was applied, the critical sources were selected and yield loss reduction through improvement actions was also investigated. From these results, it is concluded that the partition check and the composition analysis are effective solutions for particle contamination control in the cleanroom production lines.

Keywords

References

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