Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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An Experimental Analysis on Dark-field Laser Scattering for the Surface Inspection of Infrared Cut-off Filters

적외선차단필터의 표면 검사를 위한 암시야 레이저산란에 대한 실험적 분석

  • 김경범 (충주대학교 항공.기계설계학과) ;
  • 한재철 (충주대학교 대학원 항공.기계설계학과)
  • Published : 2007.11.01
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Abstract

The dark-field laser scattering system has been developed to inspect surface defects in infrared cut-off filters and then laser scattering characteristics against the defects are investigated. The qualitative analysis for the reliable and accurate detection performance is described through the correlation between incident angles of a laser and viewing ones of a camera. In this paper, reliable and important information with laser scattering is given for the surface defect inspection of IR filters. Its performance has been verified through various experiments.

Keywords

References

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